JPS6412037U - - Google Patents

Info

Publication number
JPS6412037U
JPS6412037U JP10523587U JP10523587U JPS6412037U JP S6412037 U JPS6412037 U JP S6412037U JP 10523587 U JP10523587 U JP 10523587U JP 10523587 U JP10523587 U JP 10523587U JP S6412037 U JPS6412037 U JP S6412037U
Authority
JP
Japan
Prior art keywords
wafer transfer
support member
arm
transfer device
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10523587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0636582Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10523587U priority Critical patent/JPH0636582Y2/ja
Publication of JPS6412037U publication Critical patent/JPS6412037U/ja
Application granted granted Critical
Publication of JPH0636582Y2 publication Critical patent/JPH0636582Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Drying Of Semiconductors (AREA)
JP10523587U 1987-07-10 1987-07-10 エッチング装置 Expired - Lifetime JPH0636582Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10523587U JPH0636582Y2 (ja) 1987-07-10 1987-07-10 エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10523587U JPH0636582Y2 (ja) 1987-07-10 1987-07-10 エッチング装置

Publications (2)

Publication Number Publication Date
JPS6412037U true JPS6412037U (en]) 1989-01-23
JPH0636582Y2 JPH0636582Y2 (ja) 1994-09-21

Family

ID=31337665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10523587U Expired - Lifetime JPH0636582Y2 (ja) 1987-07-10 1987-07-10 エッチング装置

Country Status (1)

Country Link
JP (1) JPH0636582Y2 (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107281A (ja) * 1990-08-27 1992-04-08 Nec Corp Ｆｅを含む物質のエッチング方法およびエッチング装置
USRE39756E1 (en) * 1990-08-29 2007-08-07 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
USRE39775E1 (en) * 1990-08-29 2007-08-21 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
US7367135B2 (en) 1990-08-29 2008-05-06 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6395648B1 (en) * 2000-02-25 2002-05-28 Wafermasters, Inc. Wafer processing system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107281A (ja) * 1990-08-27 1992-04-08 Nec Corp Ｆｅを含む物質のエッチング方法およびエッチング装置
USRE39756E1 (en) * 1990-08-29 2007-08-07 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
USRE39775E1 (en) * 1990-08-29 2007-08-21 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
USRE39776E1 (en) 1990-08-29 2007-08-21 Hitachi, Ltd. Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors
USRE39823E1 (en) * 1990-08-29 2007-09-11 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
USRE39824E1 (en) * 1990-08-29 2007-09-11 Hitachi, Ltd. Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors
US7367135B2 (en) 1990-08-29 2008-05-06 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor

Also Published As

Publication number Publication date
JPH0636582Y2 (ja) 1994-09-21

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